Deposition Systems

We can offer various turn-key UHV MBE systems for semiconductor-, metal- or oxide growth for research and industry. These systems include but are not limited to the selection shown below:

MBE Systems

MBE Systems
CVD / PVD System

CVD / PVD System
OLED System

OLED System
Integrated UHV-System

Integrated UHV-System
Sputter-System

Sputter-System
Annealing System (RTA)

Annealing System (RTA)
Research System RS-3

Research System RS-3
Research System RS-2

Research System RS-2
System for III-Nitrides

System for III-Nitrides
Mini MBE System

Mini MBE System

All systems are assembled under clean room conditions. Selected materials and chambers are used to guarantee high reliability and quality. Talk to us if you have specific needs, we can provide solutions for all kinds of physical vapour deposition (PVD) applications. Our design and manufacturing partners are highly experienced in custom designed UHV systems.

Features

  • Custom designed UHV chambers and systems using state-of-the-art CAD engineering tools
  • Accurate estimates from your sketches and specifications, for both complete systems and individual components, respectively are available
  • Certificated manufacturing of UHV chambers and systems
  • He leak check (< 1 x 10-10 mbar l/sec)
  • UHV cleaned
  • Bakeable up to 300°C