Deposition Systems

We can offer various turn-key UHV MBE systems for semiconductor-, metal- or oxide growth for research and industry. These systems include but are not limited to the selection shown below:

MBE Systems

CVD / PVD System

OLED System

Integrated UHV-System

Sputter-System

Annealing System (RTA)

Research System RS-3

Research System RS-2

System for III-Nitrides

Mini MBE System